JPH0453362B2 - - Google Patents

Info

Publication number
JPH0453362B2
JPH0453362B2 JP60274631A JP27463185A JPH0453362B2 JP H0453362 B2 JPH0453362 B2 JP H0453362B2 JP 60274631 A JP60274631 A JP 60274631A JP 27463185 A JP27463185 A JP 27463185A JP H0453362 B2 JPH0453362 B2 JP H0453362B2
Authority
JP
Japan
Prior art keywords
measured
film
film thickness
interference
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60274631A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62134507A (ja
Inventor
Joji Matsuda
Michio Namiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP27463185A priority Critical patent/JPS62134507A/ja
Publication of JPS62134507A publication Critical patent/JPS62134507A/ja
Publication of JPH0453362B2 publication Critical patent/JPH0453362B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP27463185A 1985-12-06 1985-12-06 干渉法膜厚測定方法 Granted JPS62134507A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27463185A JPS62134507A (ja) 1985-12-06 1985-12-06 干渉法膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27463185A JPS62134507A (ja) 1985-12-06 1985-12-06 干渉法膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS62134507A JPS62134507A (ja) 1987-06-17
JPH0453362B2 true JPH0453362B2 (en]) 1992-08-26

Family

ID=17544396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27463185A Granted JPS62134507A (ja) 1985-12-06 1985-12-06 干渉法膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS62134507A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6475903A (en) * 1987-09-18 1989-03-22 Ricoh Kk Method for measuring refractive index and film thickness
US5729343A (en) * 1995-11-16 1998-03-17 Nikon Precision Inc. Film thickness measurement apparatus with tilting stage and method of operation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413133B2 (en]) * 1973-05-24 1979-05-29
JPS533260A (en) * 1976-06-29 1978-01-12 Mitsubishi Electric Corp Film thickness measuring device of transparent thin film

Also Published As

Publication number Publication date
JPS62134507A (ja) 1987-06-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term